Development of Mass-controlled Ion Beam through a Vacuum Electrospray Method

Generally, focused ion beams are generated via the ionization process of liquid metal sources (LMISs); LMIS components made from pure metals or alloys. Because high operating cost associated with LMISs, suitable alternatives for a low-cost beam source must be explored. In this study, Co nitrate solution containing ethanol and 2-(2-butoxyethoxy) solvent was prepared to form an metallic ions. The Co-contained through vacuum electrospray method. I estimated mass-controlled using rotating electric field mass analyzers (REFMS). on three mass-controlling states at typical frequencies (300, 350, 400 kHz). distributions image indicate successful generation beam. This system will allow elemental-driven fabrication processs governed by periodic law REFMS.